Jun 28, 2022  
2021-2022 Academic Catalog 
2021-2022 Academic Catalog [ARCHIVED CATALOG]

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MATE 270 - Methods of Thin Film Deposition

3 unit(s)
Chemical and physical methods of thin film deposition including evaporation, sputtering, chemical vapor deposition, and electroplating. Thermodynamics and kinetics of growth; considerations for reactor design; control of deposition to alter film properties; deposition processes used for metals, dielectrics and semiconductors.

Prerequisite(s): MATE 152  (or equivalent).
Grading: Letter Graded

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