May 06, 2025  
2021-2022 Academic Catalog 
    
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EE 169 - Microelectromechanical Systems Fabrication and Design

1 unit(s)
Hands-on design, fabrication, and testing of micro electro-mechanical systems (MEMS). Processes including photolithography, etching, and metal deposition applied to MEMS. Design problems for MEMS transducer components. Introduction to MEMS simulation.

Misc/Lab: Lab 3 hours.

Prerequisite(s): MATE 25  or MATE 153  or MATE 129  / EE 129 .
Grading: Letter Graded

Cross-listed with MATE 169  / ME 169 . Mechanical Engineering is responsible for scheduling.


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