MATE 261 - Semiconductor Process Equipment

3 unit(s)
Covers the fundamental principles of equipment used in semiconductor processing. Basic vacuum technology will be covered, as well as processing tools such as CVD, PVD, ALD, Oxidation, Ion Implanter, Ion Beam Etcher, Plasma Etcher, Asher, Diffusion, and Thermal Processing. Both wet and dry tools, including basic plasma principles, will be included.

Grading: Letter Graded

Class Schedule | Syllabus Information | University Bookstore