MATE 270 - Methods of Thin Film Deposition

3 units
Chemical and physical methods of thin film deposition including evaporation, sputtering, chemical vapor deposition, and electroplating. Thermodynamics and kinetics of growth; considerations for reactor design; control of deposition to alter film properties; deposition processes used for metals, dielectrics and semiconductors.

Prerequisite(s): MATE 152 (or equivalent).
Grading: Graded

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