MATE 232 - Plasma Processing of Materials

3 units
Principles of low temperature plasmas used for materials processing, including plasma fundamentals, plasma chemistry, collision and heating mechanisms and diagnostics. Material interactions in plasma assisted etching, deposition, and surface treatment will be emphasized.

Prerequisite(s): MATH 33A, MATE 25, and PHYS 51 or equivalent courses.
Grading: Graded

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