MATE 169 - Microelectromechanical Systems Fabrication and Design

1 units
Hands-on design, fabrication, and testing of micro electro-mechanical systems (MEMS). Processes including photolithography, etching, and metal deposition applied to MEMS. Design problems for MEMS transducer components. Introduction to MEMS simulation.

Misc/Lab: Lab 3 hours.

Prerequisite(s): MATE 25 or MATE 153 or MATE 129 / EE 129.
Grading: Graded

Cross-listed with EE 169 / ME 169. Mechanical Engineering is responsible for scheduling.

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