MATE 189 - Microelectromechanical Systems and Microfluidics

3 unit(s)
Hands-on design, fabrication, and testing of microelectromechanical systems (MEMS) and microfluidic devices. Fabrication processes including oxidation, photolithography, etching, and vapor film deposition. Design problems for transducer components such as cantilever beam actuators, membrane deflection sensors, and microchannels. Introduction to multiphysics simulation of microscale devices.

Lecture 2 hours, Lab 3 hours.

Prerequisite(s): MATE 153 or MATE 25 or TECH 25 (with a grade of C- or better).
Grading: Letter Graded

Cross-listed with BME 189, EE 189, and ME 189. Mechanical Engineering. is responsible for scheduling.

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